82 citations · 133 across the 9 of their papers we have counts for
10 papers
Continuous-Time Modeling and Analysis of Particle Beam Metrology
Akshay Agarwal, Minxu Peng, Vivek K. Goyal
Particle beam microscopy (PBM) performs nanoscale imaging by pixelwise capture of scalar values representing noisy measurements of the response from secondary electrons (SEs) integ…
Online Beam Current Estimation in Particle Beam Microscopy
Sheila W. Seidel, Luisa Watkins, Minxu Peng +3
In conventional particle beam microscopy, knowledge of the beam current is essential for accurate micrograph formation and sample milling. This generally necessitates offline calib…
Secondary Electron Count Imaging in SEM
Akshay Agarwal, John Simonaitis, Vivek K. Goyal +1
Scanning electron microscopy (SEM) is a versatile technique used to image samples at the nanoscale. Conventional imaging by this technique relies on finding the average intensity o…
Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors
Lily Hallett, Ilya Charaev, Akshay Agarwal +4
We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current (DC) reactive magnetron sputtering. We have investigated the effect of variou…
Image-Histogram-based Secondary Electron Counting to Evaluate Detective Quantum Efficiency in SEM
Akshay Agarwal, John Simonaitis, Karl K. Berggren
Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these…
Large-area microwire MoSi single-photon detectors at 1550 nm wavelength
Ilya Charaev, Yukimi Morimoto, Andrew Dane +3
We demonstrate saturated internal detection efficiency at 1550 nm wavelengths for meander-shaped superconducting nanowire single-photon detectors made of 3 nm thick MoSi films with…