64 citations · 316 across the 22 of their papers we have counts for
22 papers
Feature identification for parameter extraction and defect detection using machine learning
Yan Guo, Helda Pahlavani, Artem Khachaturiants +5
Process control of advanced semiconductor nodes is not only pushing the limits of metrology equipment requirements in terms of resolution and throughput but also in terms of the ri…
Image resolution enhancement for advanced semiconductor nodes
Lucas Rencker, Omid Tajalizadehkhoob, Khalid Elsayed +7
Advanced semiconductor nodes are pushing the limits of feature sizes and require metrology with sub-nm resolution without compromising on the throughput as needed for in-line proce…
Time regularization as a solution to mitigate quantization induced performance degradation
Bas Kieft, S. Hassan HosseinNia, Niranjan Saikumar
Reset control is known to be able to outperform PID and the like linear controllers. However, in motion control systems, quantization can cause severe performance degradation. This…
Reset band for mitigatation of quantization induced performance degradation
Bas Kieft, S. Hassan HosseinNia, Niranjan Saikumar
Reset control has emerged as a viable alternative to popular PID, capable of outperforming and overcoming the linear limitations. However, in motion control systems, quantization c…
Adaptive Feedforward Control For Reset Feedback Control Systems -- Application in Precision Motion Control
Karst Brummelhuis, Niranjan Saikumar, Jan-Willem van Wingerden +1
This paper presents a novel adaptive feedforward controller design for reset control systems. The combination of feedforward and reset feedback control promises high performance as…
Frequency-Domain Modelling of Reset Control Systems using an Impulsive Description
R. N. Buitenhuis, N. Saikumar, S. H. HosseinNia
The ever-increasing industry desire for improved performance makes linear controller design run into fundamental limitations. Nonlinear control methods such as Reset Control (RC) a…