33 citations · 92 across the 10 of their papers we have counts for
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cond-mat.mtrl-sci2021★ 6 cited
Accelerated Lifetime Testing and Analysis of Delta-doped Silicon Test Structures
Connor Halsey, Jessica Depoy, DeAnna M. Campbell +7
As transistor features shrink beyond the 2 nm node, studying and designing for atomic scale effects become essential. Being able to combine conventional CMOS with new atomic scale…
cond-mat.mes-hall2021★ 28 cited
The impact of stochastic incorporation on atomic-precision Si:P arrays
Jeffrey A. Ivie, Quinn Campbell, Justin C. Koepke +9
Scanning tunneling microscope lithography can be used to create nanoelectronic devices in which dopant atoms are precisely positioned in a Si lattice within 1 nm of a target…