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physics.app-ph2021★ 27 cited
Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt +4
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic…
physics.app-ph2019★ 37 cited
Reference-free GIXRF-XRR as a methodology for independent validation of XRR on ultrathin layer stacks and a depth-dependent characterization
Philipp Hönicke, Blanka Detlefs, Yves Kayser +3
Nanolayer stacks are technologically very relevant for current and future applications in many fields of research. A non-destructive characterization of such systems is often perfo…