most citedTransmission-matrix Quantitative Phase Profilometry for Accurate and Fast Thickness Mapping of 2D Materials

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math.OC2019

Application of support vector machine for the fast and accurate reconstruction of nanostructures in optical scatterometry

Jinlong Zhu, Hao Jiang, Chuanwei Zhang +2

Nonlinear regression methods, such as local optimization algorithms, are widely used in the extraction of nanostructure profile parameters in optical scatterometry. The success of…