3 papers
physics.optics2019
Visualizable Detection of Nanoscale Perturbations
Jinlong Zhu, Aditi Udupa, Lynford L. Goddard
Using light to non-destructively detect nanoscale perturbations is vital to many fields including material characterization, human disease diagnosis, and semiconductor electronics.…
physics.app-ph2019
Optical deep learning nano-profilometry
Jinlong Zhu, Yanan Liu, Sanyogita Purandare +3
Determining the dimensions of nanostructures is critical to ensuring the maximum performance of many geometry-sensitive nanoscale functional devices. However, accurate metrology at…
math.OC2019
Application of support vector machine for the fast and accurate reconstruction of nanostructures in optical scatterometry
Jinlong Zhu, Hao Jiang, Chuanwei Zhang +2
Nonlinear regression methods, such as local optimization algorithms, are widely used in the extraction of nanostructure profile parameters in optical scatterometry. The success of…