182 citations · 794 across the 25 of their papers we have counts for
Showing 2019 · physics.app-phShow all
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physics.app-ph2019★ 66 cited
Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
J. W. Roberts, P. R. Chalker, B. Ding +7
Plasma enhanced atomic layer deposition was used to deposit thin films of Ga2O3 on to c-plane sapphire substrates using triethylgallium and O2 plasma. The influence of substrate te…
physics.app-ph2019
Thick adherent diamond films on AlN with low thermal barrier resistance
Soumen Mandal, Jerome Cuenca, Fabien Massabuau +9
Growth of 100 m thick diamond layer adherent on aluminium nitride is presented in this work. While thick films failed to adhere on untreated AlN films, hydrogen/nitrogen plas…