105 citations · 597 across the 30 of their papers we have counts for
3 papers · 1 filter
Forward simulation of coherent beams on grating structures for coherent scatterometry
Martin Hammerschmidt, Lin Zschiedrich, Lauryna Siaudinyté +3
Modelling the scattering of focused, coherent light by nano-scale structures is oftentimes used to reconstruct or infer geometrical or material properties of structures under inves…
Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions
Matthias Plock, Martin Hammerschmidt, Sven Burger +2
In optical nano metrology numerical models are used widely for parameter reconstructions. Using the Bayesian target vector optimization method we fit a finite element numerical mod…
Applying a Riesz-projection-based contour integral eigenvalue solver to compute resonance modes of a VCSEL
Lilli Kuen, Fridtjof Betz, Felix Binkowski +6
We investigate the calculation of resonance modes of a VCSEL with a Riesz projection eigenvalue solver. The eigenvalue solver is based on the principle of contour integration where…