105 citations · 597 across the 30 of their papers we have counts for
3 papers · 1 filter
Plug&play fibre-coupled 73 kHz single-photon source operating in the telecom O-band
Anna Musial, Kinga Zolnacz, Nicole Srocka +18
A user-friendly fibre-coupled single-photon source operating at telecom wavelengths is a key component of photonic quantum networks providing long-haul ultra-secure data exchange.…
An efficient approach to global sensitivity analysis and parameter estimation for line gratings
Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider +4
Scatterometry is a fast, indirect and nondestructive optical method for the quality control in the production of lithography masks. Geometry parameters of line gratings are obtaine…
Using Gaussian process regression for efficient parameter reconstruction
Philipp-Immanuel Schneider, Martin Hammerschmidt, Lin Zschiedrich +1
Optical scatterometry is a method to measure the size and shape of periodic micro- or nanostructures on surfaces. For this purpose the geometry parameters of the structures are obt…