A model for atomic precision p-type doping with diborane on Si(100)-2$\times$1

Quinn Campbell, Jeffrey A. Ivie, Ezra Bussmann +3

Diborane (B${}_2$H${}_6$) is a promising molecular precursor for atomic precision p-type doping of silicon that has recently been experimentally demonstrated [T. {Š}kere{ň}, \textit{et…