Pyramidal micro-mirrors for microsystems and atom chips

Abstract

Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS and atom chips. We have shown that structures of this shape can be used to laser-cool and hold atoms in a magneto-optical trap.

4 pages, 5 figures

References in corpus (6)

• Realization of Bose-Einstein condensates in lower dimensions
• Microfabricated high-finesse optical cavity with open access and small volume
• Towards single-atom detection on a chip
• A lattice of Magneto-Optical and Magnetic traps for cold atoms
• Integrated optical components on atom chips
• Micron-sized atom traps made from magneto-optical thin films

Cited by in corpus (15)

• Fifteen Years of Cold Matter on the Atom Chip: Promise, Realizations, and Prospects
• The Feasibility of a Fully Miniaturized Magneto-Optical Trap for Portable Ultracold Quantum Technology
• Single-laser, one beam, tetrahedral magneto-optical trap
• Laser cooling in a chip-scale platform
• Integrated magneto-optical traps on a chip
• Single-beam Zeeman slower and magneto-optical trap using a nanofabricated grating
• Invited Review: Micro-fabricated components for cold atom sensors
• Characteristics of integrated magneto-optical traps for atom chips
• Atom chip for BEC interferometry
• Zone-plate focusing of Bose-Einstein condensates for atom optics and erasable high-speed lithography of quantum electronic components
• Stimulated Laser Cooling Using Microfabrication
• Improved surface quality of anisotropically etched silicon {111} planes for mm-scale integrated optics
• Single-Beam Magneto-Optical Trap in Back-to-Back Pyramidal and Conical Mirrors
• Probing atoms and molecules close to macroscopic bodies
• Fabrication of Magneto-Optical Atom Traps on a Chip