Mechanical Dissipation in Silicon Flexures

Abstract

The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92um thick <110> single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to phi = 4.4E-7.

7 pages. Accepted by Phys Lett A, submitted for publication on 28 October 2005

References in corpus (2)

• Thermoelastic Damping in Micro- and Nano-Mechanical Systems
• Thermodynamical fluctuations and photo-thermal shot noise in gravitational wave antennae

Cited by in corpus (9)

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• Technology for the next gravitational wave detectors
• Investigation of the Young's modulus and thermal expansion of amorphous titania-doped tantala films
• Mirror thermal noise in laser interferometer gravitational wave detectors operating at room and cryogenic temperature
• Temperature-dependent mechanical losses of Eu${}^{3+}$:Y${}_2$SiO${}_5$ for spectral hole burning laser stabilization
• TOrsion-Bar Antenna: A Ground-Based Detector for Low-Frequency Gravity Gradient Measurement
• Low-vibration cryogenic test facility for next generation of ground-based gravitational-wave observatories