Scaling of dissipation in megahertz-range micromechanical diamond oscillators

Abstract

We report frequency and dissipation scaling laws for doubly-clamped diamond resonators. The device lengths range from 10 microns to 19 microns corresponding to frequency and quality-factor ranges of 17 MHz to 66 MHz and 600 to 2400 respectively. We find that the resonance frequency scales as 1/L^2 confirming the validity of the thin-beam approximation. The dominant dissipation comes from two sources; for the shorter beams, clamping loss is the dominant dissipation mechanism; while for the longer beams, surface losses provide a significant source of dissipation. We compare and contrast these mechanisms with other dissipation mechanisms to describe the data.

arXiv comment5 pages, two-column format. Related papers available at http://nano.bu.edu/

References in corpus (5)

• Thermoelastic Damping in Micro- and Nano-Mechanical Systems
• Coherent Signal Amplification in Bistable Nanomechanical Oscillators by Stochastic Resonance
• Dissipation in Nanocrystalline-Diamond Nanomechanical Resonators
• Quantum Friction in Nanomechanical Oscillators at Millikelvin Temperatures
• Quantum Friction of Micromechanical Resonators at Low Temperatures

Cited by in corpus (6)

• Mechanical systems in the quantum regime
• Surface acoustic wave resonators in the quantum regime
• High quality factor gigahertz frequencies in nanomechanical diamond resonators
• Nanomechanical resonant structures in single-crystal diamond
• Nanostructures made from superconducting boron doped diamond
• Evidence of universality in the dynamical response of micromechanical diamond resonators at millikelvin temperatures