Morphological regions and oblique incidence dot formation in a model of surface sputtering

Abstract

We study solid surface morphology created by off-normal ion-beam sputtering with an atomistic, solid-on-solid model of sputter erosion. With respect to an earlier version of the model, we extend this model with the inclusion of lateral erosion. Using the 2-dimensional structure factor, we found an upper bound $\mu \simeq 2$, in the lateral straggle $\mu$, for clear ripple formation. Above this upper bound, for longitudinal straggle $\sigma \gtrsim 1.7$, we found the possibility of dot formation (without sample rotation). Moreover, a temporal crossover from a hole topography to ripple topography with the same value of collision cascade parameters was found. Finally, a scaling analysis of the roughness, using the consecutive gradient approach, yields the growth exponents $\beta =0.33$ and 0.67 for two different topographic regimes.

arXiv comment8 pages, 14 figures

References in corpus (8)

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Cited by in corpus (9)

• Structural and Optoelectronic Behaviour of Copper Doped Cs2AgInCl6 Double Perovskite: A DFT Investigation
• Numerical analysis of the quantum dots on off-normal incidence ion sputtered surfaces
• A Monte Carlo study of surface sputtering by dual and rotated ion beams
• Crossing Statistics of Anisotropic Stochastic Surface
• Additional scaling regions of ion-sputtered surfaces
• Phase boundaries of nanodots and nanoripples over a range of collision cascades
• A general potential for molecular dynamics of ion-sputtered surfaces
• Theoretical monitoring of energy transport on solid surfaces at nano-metric scales
• Discretisation of a stochastic continuum equation of ion-sputtered surfaces