High-quality Nano-patterning of Oxide Interfaces Using Transferred Gold Mask

Abstract

Complex oxide interfaces, such as $\mathrm{SrTi}{\mathrm{O}}_3$ and $\mathrm{KTa}{\mathrm{O}}_3$ based heterostructures, host rich correlated phenomena with strong potential for advanced device applications. However, these interfaces are extremely susceptible to contamination and defect formation during nanofabrication, which often compromises device performance. Here, we present a solvent-free method for patterning oxide interfaces by employing high-resolution transferable thin metal masks in conjunction with oxygen-enriched $\mathrm{A}{\mathrm{r}}^{+}$ ion milling, which enables a clean and well-controlled nanofabrication process. Transport measurements demonstrate that the fabricated devices preserve their intrinsic properties, including high carrier mobilities, with negligible degradation compared to the pristine interfaces. This technique offers a convenient and robust route for engineering high-performance oxide electronic devices with precisely tailored transport characteristics.

v2: Fixed display issues in the HTML version and corrected minor typos/omissions. 16 pages, 10 figures

References in corpus (15)

• Tunable Rashba spin-orbit interaction at oxide interfaces
• Tuning spin-orbit coupling and superconductivity at the SrTiO3/LaAlO3 interface: a magneto-transport study
• Dominant mobility modulation by the electric field effect at the LaAlO_3 / SrTiO_3 interface
• "Water-cycle" mechanism for writing and erasing nanostructures at the LaAlO3/SrTiO3 interface
• Control of electronic conduction at an oxide heterointerface using surface polar adsorbates
• Surface defects and conduction in polar oxide heterostructures
• In-plane electronic confinement in superconducting LaAlO${}_3$/SrTiO${}_3$ nanostructures
• Coexistence of two- and three-dimensional Shubnikov-de Haas oscillations in Ar^+ -irradiated KTaO_3
• Pascal conductance series in ballistic one-dimensional LaAlO${}_3$/SrTiO${}_3$ channels
• Gate Tunable In- and Out-Of-Plane Spin-Orbit Coupling and Spin Splitting Anisotropy at LaAlO3/SrTiO3 (110) Interface
• Shubnikov-de Haas-like Quantum Oscillations in Artificial One-Dimensional LaAlO3/SrTiO3 Electron Channels
• Suppressed carrier density for the patterned high mobility two-dimensional electron gas at gamma-Al2O3/SrTiO3 heterointerfaces
• Patterning of high mobility electron gases at complex oxide interfaces
• Tunneling into a quantum confinement created by a single-step nano-lithography of conducting oxide interfaces
• Nanoscale control of the metal-insulator transition at LAO/KTO (110) and LAO/KTO (111) interfaces