Ku-Band AlScn-On-Diamond SAW Resonators with Phase Velocity above 8600 m/s

Abstract

In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity ($v_p$) of 8671 m/s, a maximum Bode-$Q$ of 408, and coupling coefficient ($k_{\mathrm{eff}}^2$) of 2.1%, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8-18 GHz are presented. The platform's high power handling above 12.5 dBm is also experimentally validated.

4 pages, 7 figures, 1 table, submitted to The 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2025)

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• First-principles calculation of electroacoustic properties of wurtzite (Al,Sc)N
• 6G Takes Shape
• Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride
• Thin-film Lithium Niobate on Insulator Surface Acoustic Wave Devices for 6G Centimeter Bands