7 papers
Uncooled low-noise thin-film optomechanical resonator for thermal sensing on lithium niobate
Yue Yu, Ran Yin, Ian Anderson +9
Optomechanical transduction harnesses the interaction between optical fields and mechanical motion to achieve sensitive measurement of weak mechanical quantities with inherently lo…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Periodically Poled Piezoelectric Lithium Niobate Resonator for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Lezli Matto +8
As the demand for compact and efficient power conversion systems increases, piezoelectric power converters have gained attention for their ability to replace bulky magnetic inducto…
19.3 GHz Acoustic Filter with High Close-in Rejection in Tri-layer Thin-Film Lithium Niobate
Omar Barrera, Sinwoo Cho, Jack Kramer +3
Acoustic filters are preferred front-end solutions at sub-6 GHz due to their superior frequency selectivity compared to electromagnetic (EM) counterparts. With the ongoing developm…
Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Sinwoo Cho, Yinan Wang, Eugene Kwon +9
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality…
Ku-Band AlScn-On-Diamond SAW Resonators with Phase Velocity above 8600 m/s
Tzu-Hsuan Hsu, Kapil Saha, Jack Kramer +4
In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to th…