Self-aligned pillar arrays embedding site-controlled single quantum dots for enhanced non-classical light emission

Abstract

This work presents a foundational approach for fabricating arrays of self-aligned micro- and nanopillar structures incorporating individual site-controlled quantum dots (QDs) for enhanced light extraction. This method leverages the non-planar surface morphology of pyramidal QD samples to define dielectric masks self - aligned to the QD positions. The mask size, and consequently the lateral dimensions of the pillars, is precisely controlled through a chemical mechanical polishing step, obviating the need for any additional lithography step for creating the pillar. This fabrication technique offers several key advantages, including precise control over the pillar sites, and fully deterministic embedding of QD structures. The functionality of the structures was validated by integrating single In0.25Ga0.75As QDs - upon two-photon excitation of the biexciton state, the emission of single and polarization-entangled photon pairs was observed. Additionally, an extra fabrication step to deposit dome-like structures atop the pillars was demonstrated, effectively enhancing light extraction efficiency up to 12%.

References in corpus (23)

• A bright and fast source of coherent single photons
• Strain-mediated coupling in a quantum dot-mechanical oscillator hybrid system
• Towards quantum dot arrays of entangled photon emitters
• Strain-Tunable GaAs Quantum dot: A Nearly Dephasing-Free Source of Entangled Photon Pairs on Demand
• Quantum dots for photonic quantum information technology
• The photonic trumpet: An efficient, broadband interface between a solid-state quantum emitter and a Gaussian beam
• Direct observation of nanofabrication influence on the optical properties of single self-assembled InAs/GaAs quantum dots
• Phonon-Assisted Incoherent Excitation of a Quantum Dot and its Emission Properties
• On-demand source of maximally entangled photon-pairs using the biexciton-exciton radiative cascade
• Engineering of selective carrier injection in patterned arrays of single-quantum-dot entangled photon light-emitting diodes
• Deterministically Fabricated Solid-State Quantum-Light Sources
• A source of entangled photons based on a cavity-enhanced and strain-tuned GaAs quantum dot
• Conditions for entangled photon emission from (111)B site-controlled Pyramidal quantum dots
• Observation of intensity squeezing in resonance fluorescence from a solid-state device
• Assessing the alignment accuracy of state-of-the-art deterministic fabrication methods for single quantum dot devices
• Complex optical signatures from quantum dot nanostructures and behavior in inverted pyramidal recesses
• Polarized and Un-Polarized Emission from a Single Emitter in a Bullseye Resonator
• Initialization of a spin qubit in a site-controlled nanowire quantum dot
• Indium segregation during III-V quantum wire and quantum dot formation on patterned substrates
• Spectral signatures of high-symmetry quantum dots and effects of symmetry breaking
• Statistical study of stacked/coupled site-controlled pyramidal quantum dots and their excitonic properties
• Biexciton Initialization by Two-Photon Excitation in Site-Controlled Quantum Dots: the Complexity of the Antibinding State Case
• Optical pumping and initialization of a hole spin in site-controlled InGaAs pyramidal quantum dots