High-yield large-scale suspended graphene membranes over closed cavities for sensor applications

Abstract

Suspended membranes of monoatomic graphene exhibit great potential for applications in electronic and nanoelectromechanical devices. In this work, a "hot and dry" transfer process is demonstrated to address the fabrication and patterning challenges of large-area graphene membranes on top of closed, sealed cavities. Here, "hot" refers to the use of high temperature during transfer, promoting the adhesion. Additionally, "dry" refers to the absence of liquids when graphene and target substrate are brought into contact. The method leads to higher yields of intact suspended monolayer CVD graphene and artificially stacked double-layer CVD graphene membranes than previously reported. The yield evaluation is performed using neural-network-based object detection in SEM images, ascertaining high yields of intact membranes with large statistical accuracy. The suspended membranes are examined by Raman tomography and AFM. The method is verified by applying the suspended graphene devices as piezoresistive pressure sensors. Our technology advances the application of suspended graphene membranes and can be extended to other two-dimensional (2D) materials.

30 pages of manuscript plus 17 pages of Supporting Information

References in corpus (5)

• Ultrahigh electron mobility in suspended graphene
• Nanoelectromechanical Sensors based on Suspended 2D Materials
• Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors
• Non-invasive Scanning Raman Spectroscopy and Tomography for Graphene Membrane Characterization
• Enhanced intrinsic voltage gain in artificially stacked bilayer CVD graphene field effect transistors

Cited by in corpus (1)

• Piezoresistive PtSe${}_2$ pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates