Mechanical mode imaging of a high-Q hybrid hBN/Si${}_3$N${}_4$ resonator

Abstract

We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress Si${}_3$N${}_4$ membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the Si${}_3$N${}_4$ membrane. The measured resonance frequencies and spatial profiles of the modes are consistent with finite-element simulations based on an idealized geometry. Spectra of the thermal motion reveal that, depending on the degree of hybridization with modes of the heavier and higher-quality-factor Si${}_3$N${}_4$ membrane, the quality factors and the motional mass of the hBN drum modes can be shifted by orders of magnitude. This effect could be exploited to engineer hybrid drum/membrane modes that combine the low motional mass of 2D materials with the high quality factor of Si${}_3$N${}_4$ membranes for optomechanical or sensing applications.

16 pages, 4 figure, 1 supplementary section (6 pages, 3 figures)

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