A full degree-of-freedom photonic crystal spatial light modulator

Abstract

Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-finesse microcavities through inverse design, (ii) scalable fabrication by optimized, 300 mm full-wafer processing, (iii) picometer-precision resonance alignment using automated, closed-loop "holographic trimming", and (iv) out-of-plane cavity control via a high-speed micro-LED array. Combining each, we demonstrate near-complete spatiotemporal control of a 64-resonator, two-dimensional SLM with nanosecond- and femtojoule-order switching. Simultaneously operating wavelength-scale modes near the space- and time-bandwidth limits, this work opens a new regime of programmability at the fundamental limits of multimode optical control.

25 pages, 20 figures

References in corpus (6)

• The James Webb Space Telescope
• Attojoule Optoelectronics for Low-Energy Information Processing and Communications: a Tutorial Review
• Phase-only transmissive spatial light modulator based on tunable dielectric metasurface
• Photonic-crystal slabs with a triangular lattice of triangular holes investigated using a guided-mode expansion method
• Electrically-controlled digital metasurface device for light projection displays
• Post-Fabrication Trimming of Silicon Photonic Ring Resonators at Wafer-Scale

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