Low Resistance III-V Hetero-contacts to N-Ge

Abstract

We experimentally study III-V/Ge heterostructure and demonstrate InGaAs hetero-contacts to n-Ge with a wide range of In % and achieve low contact resistivity (${\rho }_C$) of $5\times 10^{-8}\Omega \cdot c{m}^2$ for Ge doping of $3\times 10^{19}c{m}^{-3}$. This results from re-directing the charge neutrality level (CNL) near the conduction band and benefiting from low effective mass for high electron transmission. For the first time, we observe that the heterointerface presents no temperature dependence despite the two different conduction minimum valley locations of III-V ($\Gamma$-valley) and Ge (L-valley), which potentially stems from elastic trap-assisted tunneling through defect states at the interface generated by dislocations. The hetero-interface plays a dominant role in the overall ${\rho }_C$ below $\approx 1\times 10^{-7}\Omega \cdot c{m}^2$, which can be further improved with large active dopant concentration in Ge by co-doping.

2 pages, 16 figures; Accepted in SSDM 2017