Atomic process of oxidative etching in monolayer molybdenum disulfide
arXiv:1811.04242 · doi:10.1016/j.scib.2017.05.016
Abstract
The microscopic process of oxidative etching of two-dimensional molybdenum disulfide (2D MoS2) at an atomic scale is investigated using a correlative TEM-etching study. MoS2 flakes on graphene TEM grids are precisely tracked and characterized by TEM before and after the oxidative etching. This allows us to determine the structural change with an atomic resolution on the edges of the domains, of well-oriented triangular pits and along the grain boundaries. We observe that the etching mostly starts from the open edges, grain boundaries and pre-existing atomic defects. A zigzag Mo edge is assigned as the dominant termination of the triangular pits, and profound terraces and grooves are observed on the etched edges. Based on the statistical TEM analysis, we reveal possible routes for the kinetics of the oxidative etching in 2D MoS2, which should also be applicable for other 2D transition metal dichalcogenide materials like MoSe2 and WS2.
arXiv comment11 pages, 5 figures
References in corpus (7)
- Atomically thin MoS2: A new direct-gap semiconductor
- Control of valley polarization in monolayer MoS2 by optical helicity
- Valley polarization in MoS2 monolayers by optical pumping
- Single-Layer MoS2 Phototransistors
- Strong Photoluminescence Enhancement of MoS2 through Defect Engineering and Oxygen Bonding
- Electrical Tuning of Valley Magnetic Moment via Symmetry Control
- Capture the growth kinetics of CVD growth of two-dimensional MoS2
Cited by in corpus (5)
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- Dynamic Growth/Etching Model for the Synthesis of Two-Dimensional Transition Metal Dichalcogenides via Chemical Vapour Deposition
- Atomic-scale Oxygen-mediated Etching of 2D MoS and MoTe
- Optically Facet-Resolved Reaction Anisotropy in Two-Dimensional Transition Metal Dichalcogenides