Nanometer resolution mask lithography with matter waves: Near-field binary holography

Abstract

Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this should allow patterning down to a resolution of a few nanometers in a single exposure. However, there are many technical challenges, including those due to the very high energy of the photons. Lithography with metastable atoms has been suggested as a cost-effective, less-complex alternative to EUV lithography. The great advantage of atom lithography is that the kinetic energy of an atom is much smaller than that of a photon for a given wavelength. However, up till now no method has been available for making masks for atom lithography that can produce arbitrary, high resolution patterns. Here we present a solution to this problem. First, traditional binary holography is extended to near-field binary holography, based on Fresnel diffraction. By this technique, we demonstrate that it is possible to make masks that can generate arbitrary patterns in a plane in the near field (from the mask) with a resolution down to the nanometer range using a state of the art metastable helium source. We compare the flux of this source to that of an established EUV source (ASML, NXE:3100) and show that patterns can potentially be produced at comparable speeds. Finally, we present an extension of the grid-based holography method for a grid of hexagonally shaped subcells. Our method can be used with any beam that can be modeled as a scalar wave, including other matter-wave beams such as helium ions, electrons or acoustic waves.

arXiv comment11 pages, 8 figures; Accepted Phys. Rev. Applied 2019

References in corpus (7)

• Determination of Atom-Surface van der Waals Potentials from Transmission-Grating Diffraction Intensities
• Nanopore fabrication and characterization by helium ion microscopy
• A steady-state magneto-optical trap with 100 fold improved phase-space density
• Bose-Einstein condensate of metastable helium for quantum correlation experiments
• An ultra-bright atom laser
• On the optimal design of grid-based binary holograms for matter wave lithography
• Neutral Helium Atom Diffraction from a Micron Scale Periodic Structure: Photonic Crystal Membrane Characterization

Cited by in corpus (3)

• An atom passing through a hole in a dielectric membrane: Impact of dispersion forces on mask-based matter-wave lithography
• Purcell-induced suppression of superradiance for molecular overlayers on noble atom surfaces
• Atomic diffraction by patterned holes in hexagonal boron nitride: a comparison between semi-classical and quantum computational models