Quantitative Measurements of Nanoscale Permittivity and Conductivity Using Tuning-fork-based Microwave Impedance Microscopy

Abstract

We report quantitative measurements of nanoscale permittivity and conductivity using tuning-fork (TF) based microwave impedance microscopy (MIM). The system is operated under the driving amplitude modulation mode, which ensures satisfactory feedback stability on samples with rough surfaces. The demodulated MIM signals on a series of bulk dielectrics are in good agreement with results simulated by finite-element analysis. Using the TF-MIM, we have visualized the evolution of nanoscale conductance on back-gated $Mo{S}_2$ field effect transistors and the results are consistent with the transport data. Our work suggests that quantitative analysis of mesoscopic electrical properties can be achieved by near-field microwave imaging with small distance modulation.

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Cited by in corpus (6)

• Nanoscale Conductivity Imaging of Correlated Electronic States in WSe2/WS2 Moiré Superlattices
• Visualization of Local Conductance in MoS2/WSe2 Heterostructure Transistors
• Implementing Microwave Impedance Microscopy in a Dilution Refrigerator
• MilliKelvin microwave impedance microscopy in a dry dilution refrigerator
• Emergence of Competing Stripe Phase near the Mott Transition in Ti-doped Bilayer Calcium Ruthenates
• Microwave Imaging of Edge Conductivity in Graphene at Charge Neutrality and Quantum Hall States