Calibration of shielded microwave probes using bulk dielectrics

Abstract

A stripline-type near-field microwave probe is microfabricated for microwave impedance microscopy. Unlike the poorly shielded coplanar probe that senses the sample tens of microns away, the stripline structure removes the stray fields from the cantilever body and localizes the interaction only around the focused-ion beam deposited Pt tip. The approaching curve of an oscillating tip toward bulk dielectrics can be quantitatively simulated and fitted to the finite-element analysis result. The peak signal of the approaching curve is a measure of the sample dielectric constant and can be used to study unknown bulk materials.

10 pages, 3 figures

References in corpus (2)

• Modeling of a Cantilever-Based Near-Field Scanning Microwave Microscope
• AFM-compatible near-field scanning microwave microscope with separated excitation and sensing probes

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