Gallium phosphide-on-silicon dioxide photonic devices

Abstract

The development of integrated photonic circuits utilizing gallium phosphide requires a robust, scalable process for fabrication of GaP-on-insulator devices. Here we present the first GaP photonic devices on SiO${}_2$. The process exploits direct wafer bonding of a GaP/Al${}_x$Ga${}_{1-x}$P/GaP heterostructure onto a SiO${}_2$-on-Si wafer followed by removal of the GaP substrate and the Al${}_x$Ga${}_{1-x}$P stop layer. Photonic devices such as grating couplers, waveguides, and ring resonators are patterned by inductively coupled-plasma reactive-ion etching in the top GaP device layer. The peak coupling efficiency of the fabricated grating couplers is as high as 4.8 dB. Optical quality factors of 17000 as well as second- and third-harmonic generation are observed with the ring resonators. Because the large bandgap of GaP provides for low two-photon absorption at telecommunication wavelengths, the high-yield fabrication of GaP-on-insulator photonic devices enabled by this work is especially interesting for applications in nanophotonics, where high quality factors or low mode volumes can produce high electric field intensities. The large bandgap also enables integrated photonic devices operating at visible wavelengths.

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Cited by in corpus (13)

• Integrated gallium phosphide nonlinear photonics
• Ultra-efficient frequency comb generation in AlGaAs-on-insulator microresonators
• 400%/W second harmonic conversion efficiency in $14\mu \mathrm{m}$-diameter gallium phosphide-on-oxide resonators
• Optomechanics with one-dimensional gallium phosphide photonic crystal cavities
• Optomechanical ring resonator for efficient microwave-optical frequency conversion
• Demonstration of second harmonic generationin gallium phosphide nano-waveguides
• Tuning electronic and optical properties of free-standing Sn2Bi monolayer stabilized by hydrogenation
• Hybrid plasmonic waveguide coupling of photons from a single molecule
• Nanoscopic charge fluctuations in a gallium phosphide waveguide measured by single molecules
• Triply-Resonant Sum Frequency Conversion with Gallium Phosphide Ring Resonators
• Efficient Type II Second Harmonic Generation in an Indium Gallium Phosphide on insulator wire waveguide aligned with a crystallographic axis
• Soliton Microcomb Generation in a III-V Photonic Crystal Cavity
• Nonlinear optics in gallium phosphide cavities: simultaneous second and third harmonic generation