75 citations · 165 across the 4 of their papers we have counts for
4 papers
Vertical GaN Devices: Process and Reliability
Shuzhen You, Karen Geens, Matteo Borga +14
This paper reviews recent progress and key challenges in process and reliability for high-performance vertical GaN transistors and diodes, focusing on the 200 mm CMOS-compatible te…
Optomechanics with one-dimensional gallium phosphide photonic crystal cavities
Katharina Schneider, Yannick Baumgartner, Simon Hönl +5
Gallium phosphide offers an attractive combination of a high refractive index ( for vacuum wavelengths up to 4 μm) and a wide electronic bandgap (2.26 eV), enabling optical ca…
Highly selective dry etching of GaP in the presence of AlGaP
Simon Hönl, Herwig Hahn, Yannick Baumgartner +2
We present an inductively coupled-plasma reactive-ion etching process that simultaneously provides both a high etch rate and unprecedented selectivity for gallium phosphide (GaP) i…
Gallium phosphide-on-silicon dioxide photonic devices
Katharina Schneider, Pol Welter, Yannick Baumgartner +3
The development of integrated photonic circuits utilizing gallium phosphide requires a robust, scalable process for fabrication of GaP-on-insulator devices. Here we present the fir…