Ptychographic hyperspectral spectromicroscopy with an extreme ultraviolet high harmonic comb

Abstract

We demonstrate a new scheme of spectromicroscopy in the extreme ultraviolet (EUV) spectral range, where the spectral response of the sample at different wavelengths is imaged simultaneously. It is enabled by applying ptychographical information multiplexing (PIM) to a tabletop EUV source based on high harmonic generation, where four spectrally narrow harmonics near 30 nm form a spectral comb structure. Extending PIM from previously demonstrated visible wavelengths to the EUV/X-ray wavelengths promises much higher spatial resolution and more powerful spectral contrast mechanism, making PIM an attractive spectromicroscopy method in both the microscopy and the spectroscopy aspects. Besides the sample, the multicolor EUV beam is also imaged in situ, making our method a powerful beam characterization technique. No hardware is used to separate or narrow down the wavelengths, leading to efficient use of the EUV radiation.

References in corpus (6)

• Bright Coherent Ultrahigh Harmonics in the keV X-Ray Regime from Mid-Infrared Femtosecond Lasers
• Phase-Matched Generation of Coherent Soft-X-Rays
• Shaped-pulse optimisation of coherent soft-x-rays
• Bright, Coherent, Ultrafast Soft X-Ray Harmonics Spanning the Water Window from a Tabletop Light Source
• A new regime of nanoscale thermal transport: collective diffusion counteracts dissipation inefficiency
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Cited by in corpus (9)

• Potential of attosecond coherent diffractive imaging
• PtyLab.m/py/jl: a cross-platform, open-source inverse modeling toolbox for conventional and Fourier ptychography
• Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging
• High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector
• Broadband holography-assisted coherent imaging -- towards attosecond imaging at the nanoscale
• Agile spectral tuning of high order harmonics by inteference of two driving pulses
• Broadband ptychography using curved wavefront illumination
• Optics for broadband x-ray ptychography
• The 2D approximation quickly breaks down in reflection ptychography