High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector
arXiv:2302.14147 · doi:10.1364/OE.485779
Abstract
We present high-speed and wide-field EUV ptychography at 13.5 nm wavelength using a table-top high-order harmonic source. By employing a scientific complementary metal oxide semiconductor (sCMOS) detector the scan time for sub-20 nm high-resolution measurements were significantly reduced by up to a factor of five. The fast frame rate of sCMOS enables wide-field imaging with a field of view of 100 μm x 100 μm with an imaging speed of 4.6 Mpix/h. Furthermore, fast EUV wavefront characterization is employed using a combination of the sCMOS detector with orthogonal probe relaxation.
References in corpus (4)
- Bright Coherent Ultrahigh Harmonics in the keV X-Ray Regime from Mid-Infrared Femtosecond Lasers
- Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source
- Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
- Ultra-short-pulse high-average-power Megahertz-repetition-rate coherent extreme-ultraviolet light source