High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2

Abstract

Controlling the strain in two-dimensional materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by laser-oxidation of nano-drumhead resonators made out of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichalcogenides. Prior to the study of their mechanical properties with a laser interferometer, we checked the oxidation and crystallinity of the freely-suspended tantalum oxide in a high-resolution electron microscope. We show that the stress of tantalum oxide resonators increase by 140 MPa (with respect to pristine TaSe2 resonators) which causes an enhancement of quality factor (14 times larger) and resonance frequency (9 times larger) of these resonators.

References in corpus (4)

• Laser-thinning of MoS2: on demand generation of a single-layer semiconductor
• Probing thermal expansion of graphene and modal dispersion at low-temperature using graphene NEMS resonators
• High-Q Nanomechanics via Destructive Interference of Elastic Waves
• High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2

Cited by in corpus (5)

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• High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2
• Tunable Photodetectors via in situ Thermal Conversion of TiS${}_3$ to TiO${}_2$
• Study of charge density waves in suspended 2H-TaS2 and 2H-TaSe2 by nanomechanical resonance