Fabrication of Thin, Luminescent, Single-crystal Diamond Membranes

Abstract

The formation of single-crystal diamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material. Diamond membranes fabricated using lift-off processes involving the creation of a damaged layer through ion implantation often suffer from residual ion damage, which severely limits their usefulness for photonic structures. The current work demonstrates that strategic etch removal of the most highly defective material yields thin, single-crystal diamond membranes with strong photoluminescence and a Raman signature approaching that of single-crystal bulk diamond. These optically-active membranes can form the starting point for fabrication of high-quality optical resonators.

To appear in APL

References in corpus (3)

• Cavity QED with Diamond Nanocrystals and Silica Microspheres
• Fabrication of Ultrathin Single-Crystal Diamond Membranes
• Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide

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• Coupling of silicon-vacancy centers to a single crystal diamond cavity
• Single crystal diamond nanobeam waveguide optomechanics
• Tunable and Transferable Diamond Membranes for Integrated Quantum Technologies
• Design and low-temperature characterization of a tunable microcavity for diamond-based quantum networks
• Quantum micro-nano devices fabricated in diamond by femtosecond laser and ion irradiation
• A Diamond-Photonics Platform Based on Silicon-Vacancy Centers in a Single Crystal Diamond Membrane and a Fiber-Cavity
• Bottom-up Engineering of Diamond Nanostructures
• Subtractive 3D Printing of Optically Active Diamond Structures
• High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2
• Homogeneous Free-Standing Nanostructures from Bulk Diamond over Millimeter Scales for Quantum Technologies
• Review Article: Quantum Nanophotonics in Diamond
• Single crystal diamond membranes containing germanium vacancy color centers
• Direct-write milling of diamond by a focused oxygen ion beam
• Telecommunication-wavelength two-dimensional photonic crystal cavities in a thin single-crystal diamond membrane
• Homoepitaxial Growth of Single Crystal Diamond Membranes for Quantum Information Processing