Near infra-red Mueller matrix imaging system and application to strain imaging
arXiv:1009.5549 · doi:10.1016/j.tsf.2010.12.093
Abstract
We report on the design and performance of a near infra-red Mueller matrix imaging ellipsometer, and apply the instrument to strain imag- ing in near infra-red transparent solids. Particularly, we show that the instrument can be used to investigate complex strain domains in multi-crystalline silicon wafers.
Submitted to Thin Solid Films, 14 pages, 10 figures