Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations
arXiv:1008.4534
Abstract
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in CZ Si crystals. A classifcation of scattering inhomogeneities in initial crystals and crystals subjected to the getting process is presented.
arXiv commentDRIP-VI; unlikely to be available elsewhere