Nano-Hall sensors with granular Co-C

Abstract

We analyzed the performance of Hall sensors with different Co-C ratios, deposited directly in nano-structured form, using $C{o}_2(CO{)}_8$ gas molecules, by focused electron or ion beam induced deposition. Due to the enhanced inter-grain scattering in these granular wires, the Extraordinary Hall Effect can be increased by two orders of magnitude with respect to pure Co, up to a current sensitivity of $1\Omega /T$. We show that the best magnetic field resolution at room temperature is obtained for Co ratios between 60% and 70% and is better than $1\mu T/H{z}^{1/2}$. For an active area of the sensor of $200\times 200n{m}^2$, the room temperature magnetic flux resolution is ${\varphi }_{min}=2\times 10^{-5}{\varphi }_0$, in the thermal noise frequency range, i.e. above 100 kHz.

5 pages, 4 figures

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