Focused electron beam induced deposition meets materials science

Abstract

Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex three-dimensional nano-architectures. Over the last decade several new developments in FEBID and focused electron beam induced processing (FEBIP) have led to a growing number of scientific contributions in solid state physics and materials science based on FEBID-specific materials and particular shapes and arrangements of the employed nanostructures. In this review an attempt is made to give a broad overview of these developments and the resulting contributions in various research fields encompassing mesoscopic physics with nanostructured metals at low temperatures, direct-write of superconductors and nano-granular alloys or intermetallic compounds and their applications, the contributions of FEBID to the field of metamaterials, and the application of FEBID structures for sensing of force or strain, dielectric changes or magnetic stray fields. The very recent development of FEBID towards simulation-assisted growth of complex three-dimensional nano-architectures is also covered. In the review particular emphasis is laid on conceptual clarity in the description of the different developments, which is reflected in the mostly schematic nature of the presented figures, as well as in the recurring final sub-sections for each of the main topics discussing the respective "challenges and perspectives".

Review

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Cited by in corpus (21)

• Ultra-fast vortex motion in dirty Nb-C superconductor with a close-to-perfect edge barrier
• Layer-by-layer growth of complex-shaped three-dimensional nanostructures with focused electron beams
• Metals by micro-scale additive manufacturing: comparison of microstructure and mechanical properties
• Electronic materials with nanoscale curved geometries
• Spin-wave phase inverter upon a single nanodefect
• Supersonic dynamics of guided magnetic flux quanta
• Mass sensing for the advanced fabrication of nanomechanical resonators
• Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment
• Multiscale simulation of the focused electron beam induced deposition process
• Excitation and ionisation cross-sections in condensed-phase biomaterials by electrons down to very low energy: application to liquid water and genetic building blocks
• Reactive molecular dynamics simulations of organometallic compound W(CO)6 fragmentation
• Tension-free Dirac strings and steered magnetic charges in 3D artificial spin ice
• Engineered magnetization and exchange stiffness in direct-write Co-Fe nanoelements
• Reduction of microwave loss by mobile fluxons in grooved Nb films
• Analyzing Nanogranularity of Focused Electron-Beam-Induced Deposited (FEBID) Materials by Electron Tomography
• Effect of electron irradiation and Pr doping on the charge transport in YBCO single crystals
• Irradiation driven molecular dynamics simulation of the FEBID process for Pt(PF${}_3$)${}_4$
• Forward volume magnetoacoustic spin wave excitation with micron-scale spatial resolution
• Double helical plasmonic antennas
• Advances in multiscale modeling for novel and emerging technologies
• Velocity Map Imaging and Cross Sections of Fe(CO)5 for FEBIP Applications