Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

Abstract

Cobalt-containing deposits from Cobalt carbonyl are experimentally produced and their composition is measured. The Cobalt concentration is found to be readily tunable between 20 and 70 at.% by variation of the dwell time. The variations in metallic concentration are explained by co-deposition of hydrocarbons present in the chamber background pressure.

arXiv comment6 pages, 7 figures

References in corpus (4)

• One nanometer thin carbon nanosheets with tunable conductivity and stiffness
• Nano-Hall sensors with granular Co-C
• Resolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition
• Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2

Cited by in corpus (7)

• Layer-by-layer growth of complex-shaped three-dimensional nanostructures with focused electron beams
• Spontaneous Dissociation of Co2(CO)8 and Autocatalytic growth of Co on SiO2 : A Combined Experimental and Theoretical Investigation
• Post-growth purification of Co nanostructures prepared by focused electron beam induced deposition
• Tunable magnetism on the lateral mesoscale by post-processing of Co/Pt heterostructures
• Magnetotransport properties of iron microwires fabricated by focused electron beam induced autocatalytic growth
• Fabrication of FeSi and Fe3Si compounds by electron beam induced mixing of [Fe/Si]2 and [Fe3/Si]2 multilayers grown by focused electron beam induced deposition
• Unveiling the optical properties of a metamaterial synthesized by electron-beam-induced deposition