Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy

Abstract

A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CMOS sensor with 9.5 micron pixels show an improvement of a factor of two in point spread function to 2.7 micron at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination.

6 pages, 3 figures, submitted to Nucl. Instr. Meth. A

References in corpus (2)

• A Rad-hard CMOS Active Pixel Sensor for Electron Microscopy
• CMOS Pixel Sensor Response to Low Energy Electrons in Transmission Electron Microscopy

Cited by in corpus (4)

• Characterisation of a CMOS Active Pixel Sensor for use in the TEAM Microscope
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• Spatial Mapping of Electrostatics and Dynamics across 2D Heterostructures
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