346 citations
- Commissariat à l'Énergie Atomique et aux Énergies AlternativesFR26 papers
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- Institut polytechnique de GrenobleFR15 papers
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- Centre National de la Recherche ScientifiqueFR9 papers
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- Institut de Planétologie et d'Astrophysique de GrenobleFR5 papers
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7 papers · 1 filter
Sub- structured Lotus Surfaces Manufacturing
M. Worgull, M. Heckele, T. Mappes +6
Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applicatio…
0-level Vacuum Packaging RT Process for MEMS Resonators
N. Abelé, D. Grogg, C. Hibert +3
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is com…
Tuneable Capacitor based on dual picks profile of the sacrificial layer
S. Soulimane, F. Casset, F. Chapuis +2
In this paper, we present a novel dual gap tuneable capacitor process based on the profile of the sacrificial layer. This profile involves a tri-layer photo-resist process with onl…
Solving functional reliability issue for an optical electrostatic switch
H. Camon, C. Ganibal, N. Rapahoz +5
In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital…
Silicon on Nothing Mems Electromechanical Resonator
C. Durand, F. Casset, P. Ancey +7
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro…
A complete study of electroactive polymers for energy scavenging: modelling and experiments
C. Jean-Mistral, S. Basrour, J. J. Chaillout +1
Recent progresses in ultra low power microelectronics propelled the development of several microsensors and particularly the self powered microsystems (SPMS). One of their limitati…