1 citations · 2 across the 3 of their papers we have counts for
3 papers
cs.OH2008★ 1 cited
0-level Vacuum Packaging RT Process for MEMS Resonators
N. Abelé, D. Grogg, C. Hibert +3
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is com…
cs.OH2008★ 1 cited
Tuneable Capacitor based on dual picks profile of the sacrificial layer
S. Soulimane, F. Casset, F. Chapuis +2
In this paper, we present a novel dual gap tuneable capacitor process based on the profile of the sacrificial layer. This profile involves a tri-layer photo-resist process with onl…
cs.OH2008
Silicon on Nothing Mems Electromechanical Resonator
C. Durand, F. Casset, P. Ancey +7
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro…