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88 papers · 1 filter
Band Tail State Broadening in IGZO TFTs After pBTI-Induced Negative VT Shift Revealed via DC and 1/f Noise Measurements
R. Asanovski, P. Rinaudo, A. Chasin +9
We investigate the origin of negative threshold voltage shifts in back-gated amorphous IGZO TFTs under positive bias and high temperature stress. Combined DC and 1/f noise measurem…
Engineering Magnetic Anisotropy in Permalloy Films via Atomic Force Nanolithography
Abhishek Naik, Cyril Delforge, Nicolas Lejeune +5
Atomic force nanolithography provides a precise method for sculpting magnetic thin films, enabling controlled engineering of magnetic anisotropy in soft ferromagnets at the microsc…
Sub-unit cell engineering of CrVO superlattice thin films
Claudio Bellani, Simon Mellaerts, Wei-Fan Hsu +13
Ordered corundum oxides introduce new prospects in the field of functional oxides thin films, complementing the more widely studied class of ABO perovskites. In this work, we t…
Subthreshold Swing Behavior in Amorphous Indium-Gallium-Zinc-Oxide Transistors from Room to Cryogenic Temperatures
Hongwei Tang, Attilio Belmonte, Dennis Lin +10
While cryogenic-temperature subthreshold swing (SS) in crystalline semiconductors has been widely studied, a careful study on the temperature-dependent SS in amorphous oxide semico…
Impact of Mechanical Stress on IGZO TFTs: Enhancing PBTI Degradation
K. Vishwakarma, K. Lee, A. Kruv +8
This study investigates the impact of out-of-plane compressive mechanical stress (MS) on the performance and reliability of n-channel IGZO thin film transistors (TFTs). It is demon…
Fundamental Understanding of Exposure and Process Chemistry for Enhanced Lithography and Stability of Metal Oxide Resists
Kevin M. Dorney, Ivan Pollentier, Fabian Holzmeier +11
Metal oxide resists (MORs) have shown great promise for high resolution patterning in extreme ultraviolet (EUV) lithography, with potential for integration into high volume manufac…