most citedUnexpected Surface Implanted Layer in Static Random Access Memory Devices Observed by Microwave Impedance Microscope

22 citations

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2 papers

physics.ins-det2013★ 4 cited

Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging

Yongliang Yang, Keji Lai, Qiaochu Tang +5

This paper presents the design and fabrication of batch-processed cantilever probes with electrical shielding for scanning microwave impedance microscopy. The diameter of the tip a…

cond-mat.mes-hall2012★ 22 cited

Unexpected Surface Implanted Layer in Static Random Access Memory Devices Observed by Microwave Impedance Microscope

Worasom Kundhikanjana, Yongliang Yang, Qiaochu Tang +5

Real-space mapping of doping concentration in semiconductor devices is of great importance for the microelectronic industry. In this work, a scanning microwave impedance microscope…