62.6 GHz ScAlN Solidly Mounted Acoustic Resonators

Yinan Wang, Byeongjin Kim, Nishanth Ravi +13

We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…