4 papers
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
High-performance solidly mounted bidimensional mode resonators (S2MRs) operating around 16 GHz
Luca Spagnuolo, Luca Colombo, Kapil Saha +3
This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride on Silicon Carbide, operating near 16 GHz. Experimental re…
Ku-Band AlScn-On-Diamond SAW Resonators with Phase Velocity above 8600 m/s
Tzu-Hsuan Hsu, Kapil Saha, Jack Kramer +4
In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to th…
ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators
Luca Colombo, Luca Spagnuolo, Kapil Saha +3
This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Car…