7 papers
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Palladium-Coated Laterally Vibrating Resonators (LVRs) for Hydrogen Sensing
Gaia Giubilei, Farah Ben Ayed, Yvonne Sautriot +6
This work presents a novel hydrogen sensor based on 30% scandium-doped aluminum nitride (ScAlN) laterally vibrating resonators (LVRs) functionalized with a palladium (Pd) thin film…
Plasmonically Enhanced Flexural-Mode AlScN Nanoplate Resonator as Uncooled and Ultrafast IR Detector with High Responsivity
Aurelio Venditti, Walter Gubinelli, Enise F. Altin +4
This letter introduces a novel class of miniaturized, uncooled, and ultra-fast infrared (IR) resonant thermal detectors (RTDs) based on 30%-doped Aluminum Scandium Nitride (AlScN)…
Laterally Excited Bulk Acoustic Wave (LBAW) X-Cut Lithium Niobate Resonators
Walter Gubinelli, Ryan Tetro, Pietro Simeoni +2
In this work, Laterally excited Bulk Acoustic Wave (LBAW) resonators on X-cut Lithium Niobate (LiNbO3) and, for the first time their higher-order overtones (LOBAW) are demonstrated…
High-performance solidly mounted bidimensional mode resonators (S2MRs) operating around 16 GHz
Luca Spagnuolo, Luca Colombo, Kapil Saha +3
This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride on Silicon Carbide, operating near 16 GHz. Experimental re…