most citedNanopatterning of Si surfaces by normal incident ion erosion: influence of metal incorporation on surface morphology evolution

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cond-mat.mtrl-sci2010★ 48 cited

Nanopatterning of Si surfaces by normal incident ion erosion: influence of metal incorporation on surface morphology evolution

Jing Zhou, Stefan Facsko, Ming Lu +1

The morphology evolution of Si (100) surfaces under 1200 eV Ar+ ion bombardment at normal incidence with and without metal incorporation is presented. The formation of nanodot patt…