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physics.plasm-ph2026
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
physics.plasm-ph2026
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…