179 citations · 259 across the 8 of their papers we have counts for
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cond-mat.mtrl-sci2015★ 5 cited
XPS studies on AlN thin films grown by ion beam sputtering in reactive assistance of N+/N2+ ions: Substrate temperature induced compositional variations
Neha Sharma, S. Ilango, S. Dash +1
We report on an XPS study of AlN thin films grown on Si(100) substrates by ion beam sputter deposition (IBSD) in reactive assistance of N+/N2+ ions to unravel the compositional var…
cond-mat.mtrl-sci2015★ 5 cited
Optical band gap and associated band-tails in nanocrystalline AlN thin films grown by reactive IBSD at different substrate temperatures
Neha Sharma, Shilpam Sharma, K. Prabakar +4
AlN thin films have been grown on Si (100) substrates by reactive ion beam sputter deposition (IBSD) at different substrate temperatures varying from room temperature (RT) to 500oC…