35 citations · 84 across the 4 of their papers we have counts for
Showing 2017Show all
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quant-ph2017★ 19 cited
Nanoparticle detection in an open-access silicon microcavity
Stefan Kuhn, Georg Wachter, Franz-Ferdinand Wieser +6
We report on the detection of free nanoparticles in a micromachined, open-access Fabry-Pérot microcavity. With a mirror separation of m, a radius of curvature of mm,…
cond-mat.mes-hall2017★ 30 cited
Effect of oxygen plasma on nanomechanical silicon nitride resonators
Niklas Luhmann, Artur Jachimowicz, Johannes Schalko +4
Precise control of tensile stress and intrinsic damping is crucial for the optimal design of nanomechanical systems for sensor applications and quantum optomechanics in particular.…