30 citations · 49 across the 3 of their papers we have counts for
3 papers
physics.app-ph2019
Silicon microcavity arrays with open access and a finesse of half a million
G. Wachter, S. Kuhn, S. Minniberger +10
Optical resonators are increasingly important tools in science and technology. Their applications range from laser physics, atomic clocks, molecular spectroscopy, and single-photon…
quant-ph2017★ 19 cited
Nanoparticle detection in an open-access silicon microcavity
Stefan Kuhn, Georg Wachter, Franz-Ferdinand Wieser +6
We report on the detection of free nanoparticles in a micromachined, open-access Fabry-Pérot microcavity. With a mirror separation of m, a radius of curvature of mm,…
cond-mat.mes-hall2017★ 30 cited
Effect of oxygen plasma on nanomechanical silicon nitride resonators
Niklas Luhmann, Artur Jachimowicz, Johannes Schalko +4
Precise control of tensile stress and intrinsic damping is crucial for the optimal design of nanomechanical systems for sensor applications and quantum optomechanics in particular.…